Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12204249 | Dual diffraction order spin-on-glass phase-grating beam-splitter based oblique incidence nanopatterning and methods thereof | Steven R. J. Brueck, Alexander Neumann | 2025-01-21 |
| 12092959 | Interferometric lithography grating-mask-based wafer-scale large-area nanopatterning | Steven R. J. Brueck, Alexander Neumann | 2024-09-17 |