Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416580 | Method and system for in-line optical scatterometry | Steven R. J. Brueck | 2025-09-16 |
| 12399120 | In-line angular optical multi-point scatterometry for nanomanufacturing systems | Steven R. J. Brueck, Alexander Neumann | 2025-08-26 |
| 11327012 | Method and system for in-line optical scatterometry | Steven R. J. Brueck, Ruichao Zhu | 2022-05-10 |