| 10991592 |
Modified etch-and-deposit Bosch process in silicon |
— |
2021-04-27 |
| 10730239 |
3D printing apparatus using a beam of an atmospheric pressure inductively coupled plasma generator |
Tatiana Kerzhner, Anna Ryaboy, Joshua Kerzhner, Michael Ryaboy, Andrew Kerzhner +1 more |
2020-08-04 |
| 10475628 |
Plasma beam penetration of millimeter scale holes with high aspect ratios |
Richard Brewster Main |
2019-11-12 |
| 9484190 |
Showerhead-cooler system of a semiconductor-processing chamber for semiconductor wafers of large area |
— |
2016-11-01 |
| 9275840 |
Method for providing uniform distribution of plasma density in a plasma treatment apparatus |
— |
2016-03-01 |
| 9273393 |
Torch system for depositing protective coatings on interior walls and recesses present on the flat surface of an object |
— |
2016-03-01 |
| 8062470 |
Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containers |
Tatiana Kerzhner, Anna Ryaboy |
2011-11-22 |
| 7967945 |
RF antenna assembly for treatment of inner surfaces of tubes with inductively coupled plasma |
Tatiana Kerzhner, Anna Ryaboy |
2011-06-28 |
| 7148472 |
Aerosol mass spectrometer for operation in a high-duty mode and method of mass-spectrometry |
— |
2006-12-12 |
| 7071466 |
Mass spectrometry system for continuous control of environment |
— |
2006-07-04 |
| 6974957 |
Ionization device for aerosol mass spectrometer and method of ionization |
— |
2005-12-13 |
| 6803585 |
Electron-cyclotron resonance type ion beam source for ion implanter |
— |
2004-10-12 |
| 6791079 |
Mass spectrometer based on the use of quadrupole lenses with angular gradient of the electrostatic field |
— |
2004-09-14 |
| 6783629 |
Plasma treatment apparatus with improved uniformity of treatment and method for improving uniformity of plasma treatment |
— |
2004-08-31 |