Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6508990 | Substrate treating method and apparatus | Haruo Yoshida, Michiaki Endo, Nobuo Miyamoto, Yasuhiro Maeda | 2003-01-21 |
| 6476393 | Surface state monitoring method and apparatus | Haruo Yoshida, Michiaki Endo, Nobuo Miyamoto, Yasuhiro Maeda | 2002-11-05 |