Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6198224 | Microwave plasma generator with the short cross-sectional side of the resonator parallel to the chamber axis | Ralf Spitzl, Benedikt Aschermann | 2001-03-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6198224 | Microwave plasma generator with the short cross-sectional side of the resonator parallel to the chamber axis | Ralf Spitzl, Benedikt Aschermann | 2001-03-06 |