Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11371960 | Microscale gas breakdown device and process | Yangyang Fu, Peng Zhang | 2022-06-28 |
| 5980766 | Process optimization in gas phase dry etching | Daniel Flamm | 1999-11-09 |
| 5711849 | Process optimization in gas phase dry etching | Daniel Flamm | 1998-01-27 |