Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7632542 | Method for controlling uniformity of thin films fabricated in processing systems | — | 2009-12-15 |
| 6821910 | Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation | John N. Kidder, Jr., Gary W. Rubloff | 2004-11-23 |