Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5550082 | Method and apparatus for doping silicon wafers using a solid dopant source and rapid thermal processing | John C. Wolfe | 1996-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5550082 | Method and apparatus for doping silicon wafers using a solid dopant source and rapid thermal processing | John C. Wolfe | 1996-08-27 |