Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11892778 | Device for adjusting wafer, reaction chamber, and method for adjusting wafer | Xing Zhang | 2024-02-06 |
| 11410849 | Device and method for measuring film longitudinal temperature field during nitride epitaxial growth | Chao Wang, Ying Duan, Jing Jiang, Jun Hu, Zezhan Zhang +2 more | 2022-08-09 |
| 11340440 | Real-time monitoring microscopic imaging system for nitride MOCVD epitaxial growth mode | Chao Wang, Xueke Gou, Jing Jiang, Jun Hu, Zezhan Zhang +3 more | 2022-05-24 |