Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5869802 | Plasma producing structure | John E. Spencer, Robert Westmoreland | 1999-02-09 |
| 5196670 | Magnetic plasma producing device with adjustable resonance plane | — | 1993-03-23 |
| 4483737 | Method and apparatus for plasma etching a substrate | — | 1984-11-20 |