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UU University-Industry Cooperation Group Of Kyung Hee University: 1 patents #242 of 797Top 35%
Overall (All Time): #2,534,312 of 4,157,543Top 65%
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Patent #TitleCo-InventorsDate
12106979 Apparatus and method for controlling temperature uniformity of substrate Jin-Gyun Kim, Chang Uk Ahn, Ji-Won Lee, Do Hyeong KWON 2024-10-01