Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9291818 | Self-cleaning optical system | Kenneth Fahy, Paul Sheridan | 2016-03-22 |
| 7763872 | High power EUV lamp system | Patrick Hayden, Gerard O'Sullivan, Padraig Dunne | 2010-07-27 |