Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11231269 | Arrangement and method for robust single-shot interferometry | Klaus Körner | 2022-01-25 |
| 10612905 | Interferometer using tilted object waves and comprising a Fizeau interferometer objective | Goran Baer, Christof Pruss | 2020-04-07 |
| 10481020 | Optical method and arrangement for measuring residual stresses, in particular in coated objects | Giancarlo Pedrini, Rainer Gadow, Klaus Körner | 2019-11-19 |
| 10323938 | Method for calibrating a measuring device | Goran Baer, Christof Pruss | 2019-06-18 |
| 10066997 | Method and device for generating multispectral or hyperspectral light, for hyperspectral imaging and/or for distance measurement and/or 2D or 3D profile measurement of an object by means of spectrometry | Klaus Körner, Tobias Boettcher, Wolfram Johannes Martin Lyda, Marc Gronle | 2018-09-04 |
| 9772275 | Method and apparatus for optical absorption measurements | Klaus Koerner, Christof Pruss, Alois Herkommer, Daniel Claus | 2017-09-26 |
| 9739594 | Robust one-shot interferometer | Klaus Koerner | 2017-08-22 |
| 9383306 | Apparatus and a method for spectroscopic ellipsometry, in particular infrared spectroscopic ellipsometry | Klaus Koerner, Arnulf Roeseler, Daniel Claus | 2016-07-05 |
| 9175954 | Method and arrangement for short coherence holography | Klaus Koerner, Giancarlo Pedrini, Christof Pruss | 2015-11-03 |
| 9068862 | Device and method for optically compensating for the measuring track decentralization in rotation angle sensors | David Hopp, Christof Pruss | 2015-06-30 |
| 8934104 | Method and arrangement for robust interferometry for detecting a feature of an object | Klaus Koerner, Reinhard Berger | 2015-01-13 |
| 8804123 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Karsten Frenner, Bartosz Jan Bilski | 2014-08-12 |
| 8605289 | Method and apparatus for interferometry | Klaus Koerner | 2013-12-10 |
| 7876446 | Method and assembly for confocal, chromatic, interferometric and spectroscopic scanning of optical, multi-layer data memories | Klaus Körner, Reinhard Berger, Ulrich Droste, Christian Kohler, Christof Pruss +2 more | 2011-01-25 |
| 7787132 | Method and arrangement for a rapid and robust chromatic confocal 3D measurement technique | Klaus Körner, Christian Kohler, Evangelos Papastathopoulus | 2010-08-31 |
| 7486394 | Optical measuring head | Peter Lehmann, Peter Lücke, Jurgen Mohr, Carlos Javier Moran-Iglesias, Aiko Ruprecht +1 more | 2009-02-03 |