Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5653807 | Low temperature vapor phase epitaxial system for depositing thin layers of silicon-germanium alloy | — | 1997-08-05 |
| 5582649 | Wafer transfer apparatus for use in a film deposition furnace | — | 1996-12-10 |
| 4651012 | High brilliance lensless projection system of test patterns | Benton C. Clark, III | 1987-03-17 |