Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11384421 | High temperature sputtered stoichiometric amorphous aluminum oxide | Xiao Liu, Battogtokh Jugdersuren, Matthew R. Abernathy | 2022-07-12 |
| 9741921 | Hydrogen free amorphous silicon as insulating dielectric material for superconducting quantum bits | Xiao Liu, Daniel R. Queen, Frances Hellman, Matthew R. Abernathy, Glenn G. Jernigan | 2017-08-22 |
| 9577174 | CVD nanocrystalline silicon thermoelectric material | Xiao Liu, Daniel R. Queen, Battogtokh Jugdersuren, Qi Wang, William Nemeth | 2017-02-21 |
| 9472745 | CVD nanocrystalline silicon as thermoelectric material | Xiao Liu, Daniel R. Queen, Battogtokh Jugdersuren, Qi Wang, William Nemeth | 2016-10-18 |
| 9054640 | Method and system of an ultra high Q silicon cantilever resonator for thin film internal friction and Young's modulus measurements | Xiao Liu | 2015-06-09 |