Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7538332 | Method of Z-lift electrostatic nanolithography | Sergei F. Lyuksyutov, Richard A. Vaia | 2009-05-26 |
| 7431970 | Method of polymer nanolithography | Sergei F. Lyuksyutov, Richard A. Vaia | 2008-10-07 |
| 7241992 | Method of amplitude modulated electrostatic polymer nanolithography | Sergei F. Lyuksyutov, Richard A. Vaia, Pavlo B. Paramonov | 2007-07-10 |