Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6763718 | Micro-electro-mechanical systems ultra-sensitive accelerometer with independent sensitivity adjustment | Richard L. Waters | 2004-07-20 |
| 6581465 | Micro-electro-mechanical systems ultra-sensitive accelerometer | Richard L. Waters | 2003-06-24 |
| 6550330 | Differential amplification for micro-electro-mechanical ultra-sensitive accelerometer | Richard L. Waters, Chris Hutchens | 2003-04-22 |
| 6546798 | Micro-electro-mechanical systems resonant optical gyroscope | Richard L. Waters | 2003-04-15 |
| 6176922 | Method for improving crystalline thin films with a contoured beam pulsed laser | Stephen D. Russell | 2001-01-23 |
| 6014944 | Apparatus for improving crystalline thin films with a contoured beam pulsed laser | Stephen D. Russell | 2000-01-18 |
| 5705412 | Method of making buried gate insulator field effect transistor | — | 1998-01-06 |
| 5635144 | Low temperature plasma film deposition using dielectric chamber as source material | — | 1997-06-03 |
| 5602403 | Ion Implantation buried gate insulator field effect transistor | — | 1997-02-11 |
| 5510088 | Low temperature plasma film deposition using dielectric chamber as source material | — | 1996-04-23 |
| 5399388 | Method of forming thin films on substrates at low temperatures | — | 1995-03-21 |
| H948 | Semiconductor-semiconductor compound insulator-insulator structures | — | 1991-08-06 |
| 5023056 | Plasma generator utilizing dielectric member for carrying microwave energy | David W. Brock | 1991-06-11 |
| 4707217 | Single crystal thin films | — | 1987-11-17 |
| 4450041 | Chemical etching of transformed structures | — | 1984-05-22 |