Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4755344 | Method and apparatus for the production of cluster ions | Robert J. Beuhler | 1988-07-05 |
| 4559096 | Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith | Robert Buehler, Michael W. Matthew, Myron Ledbetter | 1985-12-17 |