Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5198263 | High rate chemical vapor deposition of carbon films using fluorinated gases | C. Edwin Tracy, David K. Benson, Arthur J. Nelson | 1993-03-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5198263 | High rate chemical vapor deposition of carbon films using fluorinated gases | C. Edwin Tracy, David K. Benson, Arthur J. Nelson | 1993-03-30 |