Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5346853 | Microwave energized deposition process with substrate temperature control for the fabrication of P-I-N photovoltaic devices | Subhendu Guha, Chi C. Yang | 1994-09-13 |
| 5334423 | Microwave energized process for the preparation of high quality semiconductor material | Subhendu Guha, Chi C. Yang | 1994-08-02 |
| 5231048 | Microwave energized deposition process wherein the deposition is carried out at a pressure less than the pressure of the minimum point on the deposition system's Paschen curve | Subhendu Guha, Arindam Banerjee, Chi C. Yang | 1993-07-27 |