Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6289550 | Jet cleaning device for developing station | Chui-Kun Ke | 2001-09-18 |
| 6286178 | Jet cleaning device for developing station | Chui-Kun Ke | 2001-09-11 |
| 6097992 | Method and controlling system for preventing the scratching of wafer backs by the fetch arm of a stepper machine | Chen Tseng | 2000-08-01 |