Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9939445 | Detection method for cancer cell in vitro and system using the same | Yih-Chih Hsu | 2018-04-10 |
| 7663126 | Ion implantation system and method of monitoring implant energy of an ion implantation device | — | 2010-02-16 |
| 7001530 | Method for detecting the end point by using matrix | — | 2006-02-21 |
| 6932944 | High efficiency scrubber for waste gas abatement | Tsung-Cheng Yang | 2005-08-23 |
| 6732295 | Method and system of frequency modulated end-point detection | — | 2004-05-04 |
| 6628384 | Spectroscopic method and related apparatus for measuring electrode gap distance | — | 2003-09-30 |
| 6450683 | Optical temperature measurement as an in situ monitor of etch rate | — | 2002-09-17 |
| 6444401 | Fabrication of field emitting tips | — | 2002-09-03 |
| 6440865 | Method of profile control in metal etching | — | 2002-08-27 |
| 6064145 | Fabrication of field emitting tips | — | 2000-05-16 |
| 6052183 | In-situ particle monitoring | — | 2000-04-18 |
| 6021672 | Simultaneous in-situ optical sensing of pressure and etch rate in plasma etch chamber | — | 2000-02-08 |