Shyh-Kuen Lai

UMUnited Microelectronics: 1 patents #2,686 of 4,560Top 60%

Overall (All Time): #3,343,417 of 4,157,543Top 85%

1 Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
7632377	Dry etching apparatus capable of monitoring motion of WAP ring thereof	—	2009-12-15