Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7319074 | Method of defining polysilicon patterns | Tong-Yu Chen | 2008-01-15 |
| 7319067 | Method of simultaneously controlling ADI-AEI CD differences of openings having different sizes and etching process utilizing the same method | Jiunn-Hsing Liao | 2008-01-15 |
| 7195716 | Etching process and patterning process | — | 2007-03-27 |