Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6362092 | Planarization method on a damascene structure | Hsiao-Sheng Chin | 2002-03-26 |
| 6315917 | Using ARL to decrease EPD noise in CMP process | — | 2001-11-13 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6362092 | Planarization method on a damascene structure | Hsiao-Sheng Chin | 2002-03-26 |
| 6315917 | Using ARL to decrease EPD noise in CMP process | — | 2001-11-13 |