Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6695925 | Method and equipment for cleaning the dispersion head | — | 2004-02-24 |
| 6253781 | Process for controlling the level of an ammonium fluoride-containing acid solution in an acid vessel | — | 2001-07-03 |
| 6156122 | Depositor for depositing a dielectric layer with fewer metallic impurities and a method for reducing the content of the metallic impurities in the dielectric layer by using this depositor | — | 2000-12-05 |