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Cheng-Kweng Chen

UM United Microelectronics: 1 patents #2,686 of 4,560Top 60%
Overall (All Time): #3,382,109 of 4,157,543Top 85%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7199059 Method for removing polymer as etching residue Yi-Fang Cheng, Shan-Jen Yu, Yu-Ming Huang 2007-04-03