Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9910448 | Pressure-based gas flow controller with dynamic self-calibration | — | 2018-03-06 |
| 6922324 | Remote powering of electrostatic chucks | — | 2005-07-26 |
| 5325261 | Electrostatic chuck with improved release | — | 1994-06-28 |
| 5103367 | Electrostatic chuck using A.C. field excitation | Stephen Boronkay | 1992-04-07 |
| 4704544 | Complementary current mirror logic | — | 1987-11-03 |
| 4521286 | Hollow cathode sputter etcher | — | 1985-06-04 |
| 4495090 | Gas mixtures for aluminum etching | — | 1985-01-22 |
| 4465551 | Graded microstructured layers formed by vacuum etching | — | 1984-08-14 |
| 4462882 | Selective etching of aluminum | — | 1984-07-31 |
| 4422897 | Process for selectively etching silicon | — | 1983-12-27 |