Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7022247 | Process to form fine features using photolithography and plasma etching | Hans Peter Mikelson | 2006-04-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7022247 | Process to form fine features using photolithography and plasma etching | Hans Peter Mikelson | 2006-04-04 |