Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6532642 | Method of making a silicon carbide rail for use in a semiconductor wafer carrier | — | 2003-03-18 |
| 6409897 | Rotatable sputter target | — | 2002-06-25 |
| 6357604 | Long tooth rails for semiconductor wafer carriers | — | 2002-03-19 |
| 6171400 | Vertical semiconductor wafer carrier | — | 2001-01-09 |