Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7959819 | Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes | David Johnson, Russell Westerman | 2011-06-14 |
| 7829465 | Method for plasma etching of positively sloped structures | Ken Mackenzie, David Johnson | 2010-11-09 |
| 7381650 | Method and apparatus for process control in time division multiplexed (TDM) etch processes | David Johnson, Russell Westerman, Mike Teixeira | 2008-06-03 |
| 7115520 | Method and apparatus for process control in time division multiplexed (TDM) etch process | David Johnson, Russell Westerman | 2006-10-03 |
| 6924235 | Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method | David Johnson, Russell Westerman | 2005-08-02 |
| 6905626 | Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasma | Russell Westerman, David Johnson | 2005-06-14 |
| 6809612 | Dielectric block signal filters with cost-effective conductive coatings | Terry R. Bloom, Mark David Erickson, Ronald D. Guyer, Raymond G. Blair, Jeffrey Jacquin | 2004-10-26 |
| 6452305 | High power surface acoustic wave device | Neal J. Mellen | 2002-09-17 |
| 6259185 | Metallization for high power handling in a surface acoustic wave device and method for providing same | — | 2001-07-10 |