Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9045828 | RF plasma reactor having a distribution chamber with at least one grid | Emmanuel Turlot, Jean-Baptiste Chevrier, Jacques Schmitt | 2015-06-02 |
| 7306829 | RF plasma reactor having a distribution chamber with at least one grid | Emmanuel Turlot, Jean-Baptiste Chevrier, Jacques Schmitt | 2007-12-11 |
| 6502530 | Design of gas injection for the electrode in a capacitively coupled RF plasma reactor | Emmanuel Turlot, Jean-Baptiste Chevrier, Jacques Schmitt | 2003-01-07 |