Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9210788 | Power supply apparatus | Shinobu Matsubara, Hidenori Yoda, Yoshio Yanagiya, Takeo Toda | 2015-12-08 |
| 8734627 | Power supply apparatus | Shinobu Matsubara, Atsushi Ono | 2014-05-27 |
| 8506771 | Bipolar pulsed power supply and power supply apparatus having plurality of bipolar pulsed power supplies connected in parallel with each other | Atsushi Ono, Wataru Oshima | 2013-08-13 |
| 8467211 | Bipolar pulsed power supply and power supply apparatus having plurality of bipolar pulsed power supplies | Shinobu Matsubara, Atsushi Ono | 2013-06-18 |
| 8404089 | Sputtering method | Shinobu Matsubara | 2013-03-26 |
| 7204921 | Vacuum apparatus and vacuum processing method | Taro Yajima, Minoru Akaishi | 2007-04-17 |