TA

Toshiya Aoyagi

UL Ulvac: 1 patents #339 of 680Top 50%
Overall (All Time): #2,411,753 of 4,157,543Top 60%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12293905 Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus Makoto Arai, Satoru Takasawa 2025-05-06