Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842887 | Film formation apparatus | Tetsuhiro Ohno | 2023-12-12 |
| 11505861 | Substrate guide and carrier | Tetsuhiro Ohno | 2022-11-22 |
| 11473188 | Sputtering apparatus | Tetsuhiro Ohno | 2022-10-18 |