Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11111577 | Film-forming apparatus and film-forming method | Yousuke Kobayashi, Harunori Iwai, Atsuhito Ihori, Noriaki Tani | 2021-09-07 |
| 10490390 | Substrate processing device | Atsuhito Ihori, Masahiro Matsumoto, Noriaki Tani, Harunori Iwai, Kenji Iwata +1 more | 2019-11-26 |
| 10370757 | Thin substrate processing device | Masahiro Matsumoto, Makoto Arai, Eriko Mase, Harunori Iwai, Koji Takahashi +1 more | 2019-08-06 |