TS

Tadayuki Satou

UL Ulvac: 1 patents #339 of 680Top 50%
📍 Susono, JP: #918 of 1,238 inventorsTop 75%
Overall (All Time): #3,105,367 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8724288 Electrostatic chuck and vacuum processing apparatus Tadashi Oka, Kyuzo Nakamura 2014-05-13