Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8470403 | Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method | Hiroshi Kikuchi, Yoshio Sunaga | 2013-06-25 |
| 8298340 | Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method | Hiroshi Kikuchi, Yoshio Sunaga | 2012-10-30 |
| 8226802 | Thin film forming apparatus, film thickness measuring method and film thickness sensor | Toru Kimura | 2012-07-24 |