KK

Kenjiro Kokubu

UL Ulvac: 1 patents #339 of 680Top 50%
Overall (All Time): #2,995,286 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9310524 Film deposition apparatus and film deposition method Haruhiko Yamamoto 2016-04-12