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Film-forming apparatus |
Yixin Yang, Yoshiyuki Mitsuhashi, Masayuki Iijima, Sadatsugu Wakamatsu, Kazuhiko Saito +8 more |
2017-10-03 |
| 9109284 |
Vacuum processing apparatus |
Takayoshi Hirono |
2015-08-18 |
| 8673078 |
Take-up vacuum processing apparatus |
Takayoshi Hirono |
2014-03-18 |
| D697541 |
Film-forming apparatus |
Shinya Fujimoto, Nobuhiro Hayashi, Takayoshi Hirono, Shuji Saito |
2014-01-14 |
| D689534 |
Film-forming apparatus |
Shinya Fujimoto, Nobuhiro Hayashi, Takayoshi Hirono, Shuji Saito |
2013-09-10 |
| 8333841 |
Roll-to-roll vacuum deposition apparatus |
Nobuhiro Hayashi, Tomoharu Fujii, Atsushi Nakatsuka |
2012-12-18 |
| 7896968 |
Winding type plasma CVD apparatus |
Takayoshi Hirono, Atsushi Nakatsuka, Masashi Kikuchi, Hideyuki Ogata, Hiroaki Kawamura +2 more |
2011-03-01 |
| 7670433 |
Vacuum deposition apparatus of the winding type |
Nobuhiro Hayashi, Shin Yokoi, Atsushi Nakatsuka |
2010-03-02 |
| 4395657 |
Magnetron unit with a magnetic field compensating means |
Toshio Okamura, Akira Kousaka, Kaichiro Nakai |
1983-07-26 |
| 4296355 |
Magnetron with cooling means |
Akihiro Fukatsu |
1981-10-20 |