Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9139899 | Target device, sputtering apparatus and method for manufacturing a target device | Yutaka Kadowaki, Kazutoshi Takahashi, Masaru Sato | 2015-09-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9139899 | Target device, sputtering apparatus and method for manufacturing a target device | Yutaka Kadowaki, Kazutoshi Takahashi, Masaru Sato | 2015-09-22 |