KH

Konrad Heinle

US Ultratech Stepper: 2 patents #14 of 40Top 35%
Overall (All Time): #1,602,064 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6680774 Method and apparatus for mechanically masking a workpiece — 2004-01-20
6525805 Backside alignment system and method — 2003-02-25
5316276 Thickness compensation actuator system — 1994-05-31