Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12337473 | Method and mechanical design of a flexure interface for ultra-high-vacuum nanopositioning Invar base near-zero-length feedthrough | Deming Shu, Steven P. Kearney, William F. Toter | 2025-06-24 |
| 12234867 | Constrained flexure mechanism and method for manufacturing the same | Deming Shu, Steven P. Kearney, Ross J. Harder, Xianbo Shi, Tim M. Mooney +1 more | 2025-02-25 |
| 10663040 | Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance | Deming Shu, Barry Lai, Steven P. Kearney, Wenjun Liu, Jorg M. Maser +2 more | 2020-05-26 |