Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7149234 | High repetition rate gas discharge laser with precise pulse timing control | Palash P. Das, Jennan Yu, Stuart L. Anderson, Helmut Schillinger, Tobias Pflanz +4 more | 2006-12-12 |
| 6859482 | Modular gas laser discharge unit | Hans Kodeda | 2005-02-22 |
| 6798814 | Gas discharge laser, method of operating a gas discharge laser, and use of a sintered filter | Stephan Geiger, Tobias Pflanz, Ansgar Matern, Thomas Petracek, Martin Kappels +1 more | 2004-09-28 |
| 6782029 | Dedusting unit for a laser optical element of a gas laser and method for assembling | — | 2004-08-24 |
| 6782030 | Gas laser | — | 2004-08-24 |
| 6714576 | Excimer laser and method of operating an excimer laser | — | 2004-03-30 |
| 6618421 | High repetition rate gas discharge laser with precise pulse timing control | Palash P. Das, Jennan Yu, Stuart L. Anderson, Helmut Schillinger, Tobias Pflanz +4 more | 2003-09-09 |
| 6603790 | Gas laser and a dedusting unit thereof | Hans Kodeda, Helmut Frowein, Alexander Hohla | 2003-08-05 |
| 6522679 | Gas laser discharge unit | Hans Kodeda | 2003-02-18 |
| 6493375 | Adjustable mounting unit for an optical element of a gas laser | Hans Kodeda, Helmut Frowein, Alexander Hohla | 2002-12-10 |
| 6480517 | Shadow device for a gas laser | Hans Kodeda | 2002-11-12 |