Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11955761 | Beam shutter, laser arrangement and operating method for a laser arrangement | Rainer Flaig, Florian Jansen | 2024-04-09 |
| 10288815 | Fiber mounting units and fiber receiving elements | Martin Liermann, Aleksander Budnicki, Florian Jansen, Johannes Overbuschmann | 2019-05-14 |
| 9807861 | Protecting a vacuum environment from leakage | Bjoern Volz | 2017-10-31 |
| 9596743 | Beam guiding apparatus | — | 2017-03-14 |
| 8847182 | EUV radiation generating apparatus and operating methods | Martin Lambert | 2014-09-30 |
| 8649103 | Adaptive lens system | Wolfgang Andreasch, Dieter Burger, Florian Sepp | 2014-02-11 |