Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4550374 | High speed alignment method for wafer stepper | Boris Meshman, Thomas A. Kerekes, David Karlinsky | 1985-10-29 |
| 4475122 | Automatic wafer alignment technique | — | 1984-10-02 |