Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9780252 | Method and apparatus for reduction of solar cell LID | Luis Alejandro Rey-Garcia | 2017-10-03 |
| 9301340 | IR conveyor furnace having single belt with multiple independently controlled processing lanes | Richard W. Parks, Luis Alejandro Rey Garcia | 2016-03-29 |
| 8828776 | Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing | Richard W. Parks, Luis Alejandro Rey Garcia | 2014-09-09 |
| 8829396 | Finger drives for IR wafer processing equipment conveyors and lateral differential temperature profile methods | Luis Alejandro Rey Garcia, Richard W. Parks | 2014-09-09 |
| 8816253 | Dual independent transport systems for IR conveyor furnaces and methods of firing thin work pieces | Richard W. Parks, Luis Alejandro Rey Garcia | 2014-08-26 |
| 8742532 | Dopant applicator system and method of applying vaporized doping compositions to PV solar wafers | Luis Alejandro Rey Garcia, Richard W. Parks | 2014-06-03 |
| 8571396 | Rapid thermal firing IR conveyor furnace having high intensity heating section | Richard W. Parks, Luis Alejandro Rey Garcia | 2013-10-29 |
| 8039289 | Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing | Richard W. Parks, Luis Alejandro Rey Garcia | 2011-10-18 |
| 7805064 | Rapid thermal firing IR conveyor furnace having high intensity heating section | Richard W. Parks, Luis Alejandro Rey Garcia, Raymond G. Kruzek | 2010-09-28 |