Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5851846 | Polishing method for SOI | Masatake Nagaya, Akinari Fukaya, Hiroaki Himi | 1998-12-22 |
| 5451547 | Method of manufacturing semiconductor substrate | Hiroaki Himi, Tosiaki Nisizawa, Seiji Fujino | 1995-09-19 |
| 5223450 | Method of producing semiconductor substrate having dielectric separation region | Seiji Fujino, Mitsutaka Katada, Kazuhiro Tsuruta | 1993-06-29 |