Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6503562 | Semiconductor fabrication apparatus and fabrication method thereof | Kazuyoshi Saito | 2003-01-07 |
| 5169453 | Wafer supporting jig and a decompressed gas phase growth method using such a jig | — | 1992-12-08 |
| 5169684 | Wafer supporting jig and a decompressed gas phase growth method using such a jig | — | 1992-12-08 |