Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8673450 | Graphite member for beam-line internal member of ion implantation apparatus | Kiyoshi Saito, Fumiaki Yokoyama, Hitoshi Suzuki, Tetsuro Tojo, Seiji Shinohara | 2014-03-18 |